PULSED DC Power Supply

Continuous 325 – 1000 VDC

Model: HPP-20KA01KAT B

Version: Rev. S.00

PULSED

DC Power Supply

INDEX

Chapter 1 : Safety and Standard

..............................................

1.1 Important Safety Information.........................................................................................................1

1.2 Safety and Warning Symbols........................................................................................................1

1.3 Electromagnetic Compatibility Directives and Standard................................................................2

1.4 Industry Guideline.........................................................................................................................2

Chapter 2 : Introduction

...........................................................

2.1 Brief Statement.............................................................................................................................2

2.2 Key Feature...................................................................................................................................2

Chapter 3 : Specication

.........................................................

3.1 System Block Diagram ................................................................................................................. 3

3.2 Electrical Specication ................................................................................................................. 4

3.3 Reverse Time as a Function of Voltage Limit.................................................................................5

3.4 Arc Suppression Specication……………………….....................................................................11

3.5 Process and Monitor Functio ..................................................................................................... 12

3.6 Mechanical Specication............................................................................................................ 12

3.7 Environment Specication.......................................................................................................... 14

Chapter 4 : System Protection Mechanism

.............................

4.1 Input Breaker...............................................................................................................................15

4.2 Protection by MCU ..................................................................................................................... 15

Chapter 5 : Installation

...........................................................

5.2 Cooling Requirements................................................................................................................ 17

5.3 Cabinet Design........................................................................................................................... 17

5.4 Grounding .................................................................................................................................. 13

Chapter 6 : Interface

..............................................................

6.1 Front Panel................................................................................................................................. 18

6.2 Rear Panel ................................................................................................................................. 19

6.3 Main Menu Map ......................................................................................................................... 20

6.4 Digital Communication Port (Host) ............................................................................................. 21

6.5 Analog Communication Port (User)............................................................................................ 26

Chapter 7 : Operation

............................................................

7.1 Local Operating Steps ............................................................................................................... 28

7.2 D-SUB Operating Steps ............................................................................................................. 29

7.3 RS232 Operating Steps ............................................................................................................. 29

7.4 RS485 Operating Steps ............................................................................................................. 29

Chapter 8 : Maintenance

........................................................

may not be

reproduced or used in any manner whatsoever without admittance by

Delta Electronics Inc.

Warranty

This product Delta “HPP-20KA01KAT” Model is been warranted against defect in material and

workmanship for a period of “1” year after date of shipment. Delta agrees to repair or replace the fault

unit free-of-charge which fails to perform with specication and under normal use during this period.

This warranty shall not apply to the following items and will be billed of cost:

1 . To exceed the warranty period.

2 . Subject to misuse, negligence, accident or natural disaster.

3 . Used in a hazardous or dangerous manner either alone or in conjunction with other equipment.

4 . Repaired or altered by person who was not authorized by Delta.

5 . Appearance change with environment factor

Delta will be the sole arbiter for those circumstances.

To make a warranty claim please contact Delta at telephone number in the table or support at

delta.com, the fault unit transportation to Delta to be prepaid and responsibility by purchaser, and

Delta will take responsibility for ship it back.

Delta Electronics, Inc.

3 Tungyuan Road, Chungli Industrial Zone

Taoyuan County 32063, Taiwan, ROC

Tel: 886-3-4526107

Fax: 886-3-4331706

Web Site: www.deltaww.com

Chapter 1 : Safety and Standard

1.1 Important Safety Information

To keep your safety from hazardous and fatal circumstance, please read and realize the content

of this manual before installing and operating Delta “HPP-series” power supply.

1.2 Safety and Warning Symbols

The following advisory symbols as shown in Table 1.1 will be used in the manual for different level

of warning. The meanings of the advisory symbols are explained below.

Table 1.1 Safety and warning symbols (1)

This danger symbol advises that improper operation will cause

serious personal injury or death.

This warning symbol advises that improper operation will cause

serious personal injury, or catastrophic damage the generator

or any electronic devices connected to the generator, or lose

important data.

This caution symbol advises that improper operation will cause

personal injury, damage the power supply or any electronic

devices connected to the power supply, lose data.

The following advisory symbols as shown in Table 1.2 are used on safety warning labels, and/

or on printed circuit board (only provided with white paint), and/or other part of the generator. The

meanings of these symbols are explained as below.

Table 1.2 Safety and warning symbols (2)

Dangerous voltage symbol indicates the presence of high

voltage. Access the high voltage will cause serious personal

injury or death.

To protect against electrical shock in case of a fault. This symbol

indicates that the terminal must be connected to ground before

operation of equipment.

Residual voltage:

Wait 8 minutes at least for capacitor discharge after power cord is

removed and before servicing

Heavy object:

Two persons lifting are recommended to avoid muscle strain or

back injuries.

1.3 Electromagnetic Compatibility Directives and Standards

- Disturbance Characteristic: EN55011 - CRSP11 Class A, Group 1 (

>20kVA)

- General Immunity Standard for Industry: EN 61000-6-2

- Safety Requirement: IEC-61010-1 (CE and UL certication)

1.4 Industry Guideline

Guideline for Semiconductor manufacturing equipment: SEMI S2 and F47

Chapter 2 : Introduction

2.1 Brief Statement

Delta “HPP-20KA01KAT” is a high voltage pulsed DC generator that meets the exciting require-

ment in physical vapor deposition technique with a wide range of applications in the semiconductor,

optical and industrial coating, particularly for Reactive Sputtering, like Alumina, Titania and Silica

with high deposition rates.

Asymmetric pulsing output makes the arc happening reduced dramatically. With Delta micro-

sec arc detection, the output will be reversed to positive output to eliminate the arc and reduce arc

energy.

With Delta’s mutual power supply design technology, efciency at rated load is higher than com-

peting products. High efciency, less temperature stress and highly integrated circuit make it more

stable, reliable and longer product lifetime. DSP-based digital control provides user an accurate, re-

peatable and quick pulsed output response. Active front panel, multiple serial and analog interfaces

facilitate user to get an easy and exible control over power supply.

Figure 2.1 Delta “HPP-20KA01KAT” power supply

2.2 Key Feature

•

Advanced SiC mosfets module implement:

→ The highest power level of pulse DC generator.

→ The widest frequency adjustment.

•

Lossless Snubber circuit.

→ Clamp voltage stress of pulse switch.

→ Less oscillation.

•

Ultra low arc energy (< 200uJ/KW)

Chapter 3 : Specication

3.1 System Block Diagram

Figure 3.1 System block diagram of Delta “HPP-20KA01KAT”

able 3.1 Detail description for block diagram

PFC Sectionn

Three phase mains voltage is applied while breaker is closed.

After EMI lter, soft start mechanism suppresses inrush current to

prevent any damage. A good power factor condition back to the

mains then is modified through PFC section and AC voltage is

rectied to DC bus for DC-DC Section.

Inverter

The converter section converts DC voltage stored in the bulk

capacitors to high-frequency voltage by alternating the current

through switching power components. In the output side, an

isolation transformer steps up the high-frequency voltage from

the converter section and delivers it to a full-wave rectier bridge.

The rectied DC power is then passed through a measurement

section to the output connector.

DC Chopper Section

In the pulse section, a tapped inductor and a controlled switch

are responsible for generating pulse output from straight DC.

Output Measurement

and Feedback

The output measurement section measures current and voltage,

and feedback the voltage and current information to MCU for

voltage, current and power control and related protection.

Housekeeping

supplies

The AUX power provides low voltage source to supply the Vcc of

analog OPA, main controller, MCU, fan and LCD display.

Control Circuitry

The MCU is responsible for controlling the power supply status

and providing status information to the operator through all

interfaces.

Front Panel Display

Control panel shows operating mode, command level, feedback

values, set up Arc processing, process control, interface setup,

communication set and system status during power supply

working.

Remote Control

Interface

The power supply supports three types of interfaces: a User port

(analog), a Host port (RS-232, RS-485) and an active front panel.

All three interfaces communicate operator-supplied inputs to

MCU and provide the operator with status information.

3.2 Electrical Specication

able 3.2 Electrical specication

Item Specication Condition

Input Voltage

208V ± 10% (Three Phase). 50 to 60Hz

Input Current (Per Phase)

75 A nominal per phase Rated output power

Maximum Output Power

20kW -

Output Voltage Range

131 to 1000V Measured at the DC output

Output Current Range

5 to 60A

Power Supply Efciency

> 90% Rated output power at DC 1000V

Power Factor

> 0.9 Rated output power

Output Voltage Ripple

< 2% (V ) At DC Mode

Output Voltage Accuracy

1% of command setting or 0.25%

of full scale voltage between

output and command

Within operation range at 25˚C

Output Current Accuracy

1% of command setting or 0.25%

of full scale current between

output and command

Within operation range at 25˚C

D-sub Monitor/Command

(Analog Interface) Accuracy

1% of full scale rating between

output and D-sub

Operation range

Load Regulation

1% of command setting or 0.5% of

full scale voltage between output

and command

10% to 100% Output Power

Ignition Capability

1000Vdc to 1500Vdc

100Vdc increments

Temperature Coefcient

< 50ppm/˚C

20˚C to 40˚C Variation in regulated

output

Operation Mode

CV, CC, and CP Mode -

Operation Temperature

0˚C to 40˚C% -

Arc Energy

< 200uJ per 1kW -

Main Protection

OVP, OCP, OTP, SCP, ARC

Output Frequency

5K~400KHz, 5KHz increments

Reverse Time

0.4us to 10us, 0.1us increments

Allowable reverse time is limited

for a given frequency

Reverse Voltage

Approximately 10% of the applied

voltage

RMS

Repeatability

Output power repeatability of the

DC inverter from run to run at a

constant setpoint is 0.1% from

10% to 100% of rated power.

3.3 Reverse Time as a Function of Voltage Limit (V-Limit)

V-Limit(in Volts) Corresponding Reverse Time

0-325 10 μs

330 9.8 μs

335 9.7 μs

340 9.5 μs

345 9.4 μs

350 9.2 μs

355 9.1 μs

360 9 μs

365 8.9 μs

370 8.7 μs

375 8.6 μs

380 8.5 μs

385 8.4 μs

390 8.3 μs

395 8.2 μs

400 8.1 μs

405 8 μs

410 7.9 μs

415 7.8 μs

420 7.7 μs

425 7.6 μs

430 7.5 μs

435 7.4 μs

440 7.3 μs

445 7.3 μs

450 7.2 μs

455 7.1 μs

460 7 μs

465 6.9 μs

470 6.9 μs

475 6.8 μs

480 6.7 μs

485 6.7 μs

490 6.6 μs

495 6.5 μs

500 6.5 μs

505 6.4 μs

510 6.3 μs

515 6.3 μs

520 6.2 μs

525 6.1 μs

530 6.1 μs

535 6 μs

540 6 μs

545 5.9 μs

550 5.9 μs

555 5.8 μs

560 5.8 μs

565 5.7 μs

570 5.7 μs

575 5.6 μs

580 5.6 μs

585 5.5 μs

590 5.5 μs

595 5.4 μs

600 5.4 μs

605 5.3 μs

610 5.3 μs

615 5.2 μs

620 5.2 μs

625 5.2 μs

630 5.1 μs

635 5.1 μs

640 5 μs

645 5 μs

650 5 μs

655 4.9 μs

660 4.9 μs

665 4.8 μs

670 4.8 μs

675 4.8 μs

680 4.7 μs

685 4.7 μs

690 4.7 μs

695 4.6 μs

700 4.6 μs

705 4.6 μs

710 4.5 μs

715 4.5 μs

720 4.5 μs

725 4.4 μs

730 4.4 μs

735 4.4 μs

740 4.3 μs

745 4.3 μs

750 4.3 μs

755 4.3 μs

760 4.2 μs

765 4.2 μs

770 4.2 μs

775 4.1 μs

780 4.1 μs

785 4.1 μs

790 4.1 μs

795 4.0 μs

800 4.0 μs

805 4.0 μs

810 4.0 μs

815 3.9 μs

820 3.9 μs

825 3.9 μs

830 3.9 μs

835 3.8 μs

840 3.8 μs

845 3.8 μs

850 3.8 μs

855 3.7 μs

860 3.7 μs

865 3.7 μs

870 3.7 μs

875 3.7 μs

880 3.6 μs

885 3.6 μs

890 3.6 μs

895 3.6 μs

900 3.6 μs

905 3.5 μs

910 3.5 μs

915 3.5 μs

920 3.5 μs

925 3.5 μs

930 3.4 μs

935 3.4 μs

940 3.4 μs

945 3.4 μs

950 3.4 μs

955 3.3 μs

960 3.3 μs

965 3.3 μs

970 3.3 μs

975 3.3 μs

980 3.3 μs

985 3.2 μs

990 3.2 μs

995 3.2 μs

1000 3.2 μs

Reverse Time Given a Self-Run Frequency

Requested

Frequency

(kHz)

Actual

Frequency

(kHz)

Pulse

Reversal Time

Maximum (μs)

Duty Cycle

(min%)

Reverse/

Period

Duty Cycle

(max%)

Reverse/

Period

5 5 10 0.2 5

10 10 10 0.4 10

15 15.004 10 0.6 15

20 20 10 0.8 20

25 25 10 1 25

30 29.985 10 1.2 30

35 35.026 10 1.4 35

40 40 10 1.6 40

45 45.045 9.9 1.8 44.6

50 50 9 2 45

55 54.945 8.1 2.2 44.5

60 60.06 7.4 2.4 44.4

65 64.935 6.9 2.6 44.8

70 69.93 6.4 2.8 44.8

75 74.906 6 3 44.9

80 80 5.6 3.2 44.8

85 85.106 5.2 3.4 44.3

90 90.09 4.9 3.6 44.1

95 94.787 4.7 3.79 44.5

100 100 4.5 4 45

105 105.263 4.2 4.21 44.2

110 109.89 4 4.4 44

115 114.943 3.9 4.6 44.8

120 119.76 3.7 4.79 44.3

125 125 3.6 5 45

130 129.87 3.4 5.19 44.2

135 135.135 3.3 5.41 44.6

140 139.86 3.2 5.59 44.8

145 144.928 3.1 5.8 44.9

150 150.376 2.9 6.02 43.6

155 155.039 2.9 6.2 45

160 160 2.8 6.4 44.8

165 165.289 2.7 6.61 44.6

170 169.492 2.6 6.78 44.1

175 175.439 2.5 7.02 43.9

180 180.18 2.4 7.21 43.2

185 183.486 2.4 7.41 44

190 190.476 2.3 7.62 43.8

195 194.175 2.3 7.77 44.7

200 200 2.2 8 44

205 204.082 2.2 8.16 44.9

210 210.526 2.1 8.42 44.2

215 215.054 2 8.6 43

220 219.78 2 8.79 44

225 224.719 2 8.99 44.9

230 229.885 1.9 9.2 43.7

235 235.294 1.9 9.41 44.7

240 240.964 1.8 9.64 43.4

245 243.902 1.8 9.76 43.9

250 250 1.6 10 40

255 256.41 1.5 10.26 38.5

260 259.74 1.5 10.39 39

265 266.667 1.5 10.67 40

270 270.27 1.4 10.81 37.8

275 273.973 1.4 10.96 38.4

280 281.69 1.4 11.27 39.4

285 285.714 1.4 11.43 40

290 289.855 1.3 11.59 37.7

295 294.118 1.3 11.76 38.2

300 298.507 1.3 11.94 38.8

305 303.03 1.3 12.12 39.4

310 307.692 1.3 12.31 40

315 312.5 1.2 12.5 37.5

320 317.46 1.2 12.7 38.1

325 322.581 1.2 12.9 38.7

330 327.869 1.2 13.11 39.3

335 333.333 1.2 13.33 40

340 338.983 1.1 13.56 37.3

345 344.828 1.1 13.79 37.9

350 350.877 1.1 14.04 38.6

355 355.877 1 14.2 35.5

360 360.878 1 14.4 36

365 365.788 1 14.6 36.5

370 370.787 0.9 14.8 33.3

375 375.877 0.9 15 33.75

380 380.788 0.9 15.2 34.2

385 385.877 0.9 15.4 34.7

390 390.878 0.9 15.6 35.1

395 395.787 0.9 15.8 35.6

400 400.788 0.9 16 36.0

Figure 3.2 Curve of Output V-I Characteristic

Figure 3.3 Curve of Output Impedance Characteristic

For Delta “HPP-20KA01KAT” power supply, the maximum output voltage and current level are

1000 V and 60 A (Measured at the DC output). The output characteristic is as the gures above.

If the operation point is below 325V, the power supply can provide at most 60 A, if the operation is

more than 325V, the maximum output current will decrease to 20 A within the output voltage reach-

ing 1000V.

3.4 Arc Suppression Specication

Figure 3.4 shows the waveforms and key parameters under arc condition, and Table 3.3 indi-

cates the arc energy and adjustable parameters for user. As soon as the arc is detected by arc volt-

age detection within 1 microsec, power ON delay after a micro ARC will be approximately 5 micro-

seconds. When the micro ARC is cleared normal pulsing resumes.

Hard Arcs (dened as those micro Arcs which cannot be extinguished with the standard micro

ARC algorithm of a 5 microsecond shutdown) will be detected within low impedance after the initial

micro ARC started. Number of detected arcs is displayed by the front panel display or from commu-

nication interface. If hard arc inside vacuum chamber occur, the hard arc ag will be raised and the

power will shutdown for a predetermined time.

Figure 3.4 Arc suppression mechanisms

able 3.3 Arc energy specication and adjustable parameters for user

Item Specication Description

Reverse Time

5µ sec

Voltage Level Recognizing

as Arc

10V to 250V, adjustable 10V step, 100V default

Hard Arc Shutdown time

200us to 10000us

After Low Z output, power

will shutdown

Arc Energy

< 1200uJ per 1kW With System

3.5 Process and Monitor Function

able 3.4 Adjustable function parameters for User

Item Specication Description

Max. Power

2 to 20kW

Power will be constrained within

the value of setting prior to the

set point of regulation

Max. Current

5 to 60A

Current will be constrained

within the value of setting prior

to the set point of regulation

Max. Voltae

500 to 1000V

Voltage will be constrained

within the value of setting prior

to the set point of regulation

Ignition Mechanism

1000 to 1500V

A voltage up to 1500 V is adjus-

table for igniting the system

Ramp Time

50 to 2000ms

A ramp up to set point is adjus-

table for a soft start mechanism

Set Point

1 to 10s

Monitoring if the output reaches

the setting of regulation within

the setting of period

Energy Mode

1 to 99999 kJ

Monitoring if the output energy

reaches the setting of energy

Target Life Mode

1 to 15000 kWh

Monitoring if the output energy

reaches the setting of kWh

3.6 Mechanical Specication

The outward appearance, cooling specication for minimum CFM Requirement, and I/O ports

Delta “HPP-20KA01KAT” sputtering power supply are described as below:

able 3.5 Mechanical specication

Item Description

Physical Dimension

482.6 mm (W) x 132.5 mm (H) x 600 mm (L)

19" (W) x 5.2" (H) x 23.6" (L)

(19" 3U)

Weight

45kg

Coolingt

Fan cooling

Noise

Noise generated by this unit under 70 dB (A) at a 1m

distance in 25˚C ambient temperature

AC Input Connector

4 pin terminal block

DC Output Connector

UHF connector,female

User Port

Analog I/O: 15-pin female D-sub

Host Port

Digital I/O: 9-pin female RS232 and RS485 and RJ45

Figure 3.5 Physical dimension of HPP-20KA01KAT sputtering power supply

Air cooling

Figure 3.6 Air ow directions

Delta “HPP-20KA01KAT” sputtering power supply is the forced air cooling type. Please keep

enough space for air ow cooling capability when it is installing to the cabinet. Air inlet on the front

panel and air outlet on the rear panel is shown in gure 3.6. Air outlet of rear panel is responsible

for dissipating the heat from inside of power supply to outside by internal two fans. The temperature

of air inlet should not exceed 40

℃

3.7 Environment Specication

able 3.6 Climatic specication

Item Temperature Relative Humidity Air Pressure

Operating

0 to 40˚C

(32˚F to 104˚F)

10% to 90% RH

(Non-

condensing)

80 to 106kPa

(approximately

2000m

above sea

level)

Storage

-25 to 55˚C

(-13˚F to 131˚F)

10% to 95% RH

80 to 106kPa

(approximately

2000m

above sea

level)

Transportation

-25 to 40˚C

(-13˚F to 104˚F)

95% RH

(Maximum)

66 to 106kPa

(approximately

2000m

above sea

level)

able 3.7 Environment specication

Item Description

Operating

Category II

Pollution Degree

Pollution Degree 2

Chapter 4 :System Protection Mechanism

4.1 Input Breaker

The function of this switch is to prevent over current at input side from any malfunction

happen-

ing and simultaneously provide a manual switch for user to turn off the power supply.

4.2 Protection by MCU (A: Auto Recovery, L: Latch)

Table 4.1 Denition and description of MCU protection

Alarm Condition Code Description Mode

HW Fault M1

M1F Hardware error from the left module

(3 min latch)

HW Fault M2

M2F Hardware error from the right module

(3 min latch)

SW OVP

OV Output over voltage

(3 min latch)

SW OCP

OC Output over current

(3 min latch)

SW OPP

OP Output over power

(3 min latch)

Arc Number Limit

07 Arc number is over setting parameter L

Target Life Monitor

09 Power off while output reaches setting Energy L

Output Interlock

11 Uninstallation of output cover L

Contactor Interlock

12 Uninstallation of contactor pin in D-sub connector L

Communication Loss

15 Error from internal communication L

Fan1 Error

17 Error from the left fan L

Fan2 Error

18 Error from the right fan L

Bus UVP

20 Input voltage is under operation range L

Bus OVP

21 Input voltage is over operation range L

GND Detect

22 Positive output is not connected to system ground L

Set Point Monitor

Error while output fails to reach setting parameter

within setting time

Energy Mode Monitor

24 Power off while output reaches setting energy L

Warning Condition Code Description Mode

Arc Density Limit

01 Arc Density is over parameters of setting A

Output Limit

limit Output is over setting parameters of setting A

Chapter 5 :Installation

Delta “HPP-20KA01KAT” power supply is a high voltage power supply. Please read this manual

carefully and follow the instruction before installation and operation, otherwise an electric shock or

a fatal accident might be caused.

Figure 5.1 Installation diagram

- This power supply could only be placed horizontally and connect the protective grounding to

prevent an electric shock before use.

- Consideration must be taken not to impede the supply or ow of air to the unit.

- Please switch off the power supply before touching the case.

- Before applying power, please verify that the product is set to match with the line voltage.

- The circumstance temperature should be managed under 40˚C

- The installation and operation should be only in pollution degree 2 or better environment. Do

not operate this device in a dusty area or in corrosive gas environment.

- Proper grounding: For safe use, must connect ground cable (Yellow / Green wire) from ground

stud on the power supply rear panel to the pure earth ground. Poor grounding may cause an

electric shock or fatal accident.

- Output connector must be connected with the attached output cable. (3KV/6AWG/200°C, with

shielding). Do not use other output cables.

- Before applying power, please verify that the product is set to match with the line voltage.

When emergency, cut-off the circuit breaker, and then removing mains supply cord.

- Operating personnel must not remove the cover of the instrument. Component replacement

and internal adjustment can be done only by qualied service personnel.

- Remove mains cord and output cable before exterior maintenance and service.

- Use the carrying handle when dismantling it. Avoid drop resulting in hurt.

5.1 Cooling Requirements

For the HPP-20KA01KAT B supply to be sufciently cooled, the cabinet must be set up to:.

1. Bring in coolant air of the correct temperature(40 ˚C maximum)

2. Distribute coolant air to the power supplies

3. Prevent air exhausted from the cabinet from circulating back and becoming input air

4. Exhaust the hot air from the cabinet with minimal airow restriction.

5.2 Cabinet Design

The following is a synopsis of the HPP-20KA01KAT A to follow when designing a cabinet con-

taining a stack of HPP-20KA01KAT A power supplies.

Coolant air must be drawn easily into the cabinet; exhaust air must be able to pass unrestricted

out of the cabinet. If some physical constriant restricts the ow of exhaust air out of the cabinet,

we recommend that fans or blowers be mounted so that the hot air is removed from the cabinet as

quickly as possible.

Each HPP-20KA01KAT A power supply dissipates up to 10% of its maximum power at full rated

output. The minimum air flows in cubic feet per minute(CFM) required by individual HPP-20KA-

01KAT A supplies are shown in table 5.1. The static pressure(inches of water) of the empty cabinet

should not exceed 0.1 inches of water at the CFM level obtained by adding together the minimum

CFM values for all the power supplies that will be placed in the cabinet. For example, if three HPP-

20KA01KAT A supplies are mounted in a cabinet, the minimum CFM requirement would be three

times the CFM of cabinet air volume compared to an individual supply.

Approximations of this gure, the total power dissipation, and the temperature difference be-

tween coolant air and exhaust air are shown as an example in table 5.2.

Table 5.1 Minimum CFM requirement for HPP-20KA01KAT unit

Type of PSU CFM Required

20KW 260 CFM (122.7 liters/second)

Table 5.2 Approximate cooling requirements for three units mounted in a cabinet

Type of PSU CFM for 3 Supplies Total Power Dissipation

Dif. In Temp. Between

Coolant & Exhaust Air

20KW x 3

780CFM

(260+260+260=780)

(368.1 liters/ second)

9000W

(3000+3000+3000=9000)

23 ˚C

5.3 Grounding

For your convenience, the rear panel of the HPP-20KA01KAT supply features three equipoten-

tial ground screw: three M4 screw. These are indicated on the rear panel by a ground symbol.See

gure 6.2 for more information.

Chapter 6 : Interface

6.1 Front Panel

The functions for several buttons on the front panel are described on Table 6.1

Table 6.1 Function description of front panel

“Enter” Button

1. Press the button to change all of adaptive parameters.

2. Press the button to enter the next layer while in menu screen.

“Menu” Button

1. Press the button to menu screen from home screen.

2. Press the button to return to the previous layer while in menu screen.

“P” Button

Press the button to set the output condition in constant power mode. In constant

power mode user could adjust output power regulation level by “enter button” and

“knob”.

“I” Button

Press the button to set the output condition in constant current mode. In constant

current mode user could adjust output current regulation level by “enter button” and

“knob”.

“V” Button

Press the button to set the output condition in constant voltage mode. In constant

voltage mode user could adjust output voltage regulation level by “enter button” and

“knob”.

“ON” Button

Press the button to turn on the output power. While power on User could adjust

output regulation level by “enter button” and “knob”.

“OFF” Button

Press the button to turn on the output power.

“LOCK” Button

Press the button to lock “Enter”, “Menu”, “P”, “I”, “V”, “ON”, “OFF” button. This

function could prevent any unexpected change from panel while PSU in operation.

Regulation Knob

Rotate the knob to adjust the regulation level.

LCD Display

The display shows command of output regulation level according to control modes of

Power/Current/Voltage. It also indicates feedback values of Power/Current/Voltage

and system status, such as error conditions for all protect signals.

Figure 6.1 Front panel

6.2 Rear Panel

1. GND terminal is for chamber grounding, and earth grounding should be performed for safety.

2. Connect output terminal to target and connect +COM to the grounding of the chamber.

Figure 6.2 Rear panel

6.3 Main Menu Map

Figure 6.3 Function key

6.4 Digital Communication Port (Host)

The 9-pin female RS232 connector labeled “Host Port” on the rear of the power supply lets user

connect with computer to control the power supply. Denition of RS232 connector is as follows:

Figure 6.4 Host Port: 9-pin female RS232/RS485 connector

Table 6.2 Denition of RS232 RS485 connector

Pin 1

N/A

Pin 2

RS-232(Tx)

Pin 3

RS-232(Rx)

Pin 4

N/A

Pin 5

GND

Pin 6

RS-485 (+)

Pin 7

RS-485 (-)

Pin 8

N/A

Pin 9

N/A

Table 6.3 Protocol of RS232 denition (1)

Remote to PSU

Byte

0 1 2 3 4 5 6 7 8 9 10

IP Command Data1 Data2 Check Sum Termination

Byte H-Byte L-Byte H-Byte L-Byte H-Byte L-Byte 0x00 Byte 0x00 0x0D

CV Mode

IP 0x11 0x00/01/02 0x00 0x00 Value 0x00 Value 0x00 0x0D

CC Mode

IP 0x12 0x00/01/02 0x00 0x00 Value 0x00 Value 0x00 0x0D

CP Mode

IP 0x13 0x00/01/02 0x00 0x00 Value 0x00 Value 0x00 0x0D

Master/

Slave

IP 0x14 0x00/01 0x00 0x00 Value 0x00 Value 0x00 0x0D

A/Ri Offset

IP 0x15 0x00/01 0x00 0x00 00/01 Value 0x00 Value 0x00 0x0D

A/Vo Offse

IP 0x16 0x00/01 0x00 0x00 00/01 Value 0x00 Value 0x00 0x0D

A/Io Offset

IP 0x17 0x00/01 0x00 0x00 00/01 Value 0x00 Value 0x00 0x0D

Terminating

Resistor

IP 0x18 0x00/01 0x00 0x00 IP Value 0x00 Value 0x00 0x0D

Set Point

IP 0x1A 0x00/01/02 0x00 0x00 Value 0x00 Value 0x00 0x0D

Pause Time

IP 0x1B 0x00/01 0x00 0x00 Value 0x00 Value 0x00 0x0D

Energy

Mode

IP 0x1D 0x00/01/02 Value Value 0x00 Value 0x00 0x0D

Arc

Function

IP 0x1E 0x00/01 0x00 0x00 Value 0x00 Value 0x00 0x0D

Max Power

IP 0x22 0x00/01 0x00 0x00 Value 0x00 Value 0x00 0x0D

Max Current

IP 0x23 0x00/01 0x00 0x00 Value 0x00 Value 0x00 0x0D

Max Voltage

IP 0x24 0x00/01 0x00 0x00 Value 0x00 Value 0x00 0x0D

Ramp Time

IP 0x25 0x00/01 0x00 0x00 Value 0x00 Value 0x00 0x0D

Target Life

IP 0x26 0x00/01/02 0x00 0x00 Value 0x00 Value 0x00 0x0D

Pulse Duty

IP 0x29 0x00/01 0x00 0x00 Value 0x00 Value 0x00 0x0D

Pulse kHz

IP 0x2A 0x00/01 0x00 0x00 Value 0x00 Value 0x00 0x0D

VTHRS

IP 0x2B 0x00/01 0x00 0x00 Value 0x00 Value 0x00 0x0D

Arc Voltage

IP 0x30 0x00/01 0x00 0x00 Value 0x00 Value 0x00 0x0D

Limit Arc

Number

IP 0x31 0x00/01/02 0x00 0x00 Value 0x00 Value 0x00 0x0D

Total ARC

Number

IP 0x32 0x00/01/02 0x00 0x00 Value 0x00 Value 0x00 0x0D

Ignition

Data

IP 0x33 0x00/01 0x00 0x00 Value 0x00 Value 0x00 0x0D

External On

IP 0x41 0x00/01/02 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x0D

External Off

IP 0x42 0x00/01/02 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x0D

Reset

IP 0x45 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x0D

Default 1

IP 0x60 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x0D

Default 2

IP 0x61 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x0D

Default 3

IP 0x62 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x0D

Default 4

IP 0x63 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x0D

Version

Return

IP 0x70 0x02 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x0D

Error IP and

Alarm Code

Return

IP 0x71 0x02 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x0D

PSU State

Return

IP 0x80 0x02 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x0D

Table 6.4 Protocol of RS232 denition (2)

PSU to Remote

Byte

0 1 2 3 4 5 6 7 8 9 10

IP Command Data1 Data2 Check Sum Termination

Byte H-Byte L-Byte H-Byte L-Byte H-Byte L-Byte 0x00 Byte 0x00 0x0D

CV Mode

IP 0x11 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

CC Mode

IP 0x12 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

CP Mode

IP 0x13 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Master/

Slave

IP 0x14 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

A/Ri Offset

IP 0x15 0x0A 0x00 0x00 00/01 Value 0x00 Value 0x00 0x0D

A/Vo Offse

IP 0x16 0x0A 0x00 0x00 00/01 Value 0x00 Value 0x00 0x0D

A/Io Offset

IP 0x17 0x0A 0x00 0x00 00/01 Value 0x00 Value 0x00 0x0D

Terminating

Resistor

IP 0x18 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Set Point

IP 0x1A 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Pause Time

IP 0x1B 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Energy

Mode

IP 0x1D 0x0A Value Value 0x00 Value 0x00 0x0D

Arc

Function

IP 0x1E 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Max Power

IP 0x22 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Max Current

IP 0x23 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Max Voltage

IP 0x24 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Ramp Time

IP 0x25 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Target Life

IP 0x26 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Pulse Duty

IP 0x29 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Pulse kHz

IP 0x2A 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

VTHRS

IP 0x2B 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Arc Voltage

IP 0x30 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Limit Arc

Number

IP 0x31 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Total ARC

Number

IP 0x32 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

Ignition

Data

IP 0x33 0x0A 0x00 0x00 Value 0x00 Value 0x00 0x0D

External On

IP 0x41 0x0A 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x0D

External Off

IP 0x42 0x0A 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x0D

Reset

IP 0x45 0x0A 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x0D

Default 1

IP 0x60 0x0A 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x0D

Default 2

IP 0x61 0x0A 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x0D

Default 3

IP 0x62 0x0A 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x0D

Default 4

IP 0x63 0x0A 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x0D

Version

Return

IP 0x70 0x0A 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x0D

Error IP and

Alarm Code

Return

IP 0x71 0x0A 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x0D

Byte 0 1 2 3 4 5 6 7 8 9 10 11

IP 0x90 Status1 Status2 Warning Alarm Voltage(V) Current(.0A) Power(.0Kw)

Byte

12 13 14 15 16 17 18 19 20 21 22 23

User Command Arc Density(/s) Arc Counter 0x00

Check

Sum

0x00 0x0D

Note: Check Sum Value is the summation of “1” signal calculated by byte 0 to 6.

Note: Use 9600bps, 8 data bits, no parity, 1 stop bit (9600 8-N-1)

Bit 0 1 2 3 4 5 6 7

Status1

CV Mode CC Mode CP Mode HV ON

Setpoint

MODE

Ignition

MODE

System

Warning

System

Shutdown

Bit 0 1 2 3 4 5 7 7

Status2

System

Ready

OVP OCP OTP OPP Interlock Arc Protect

AC Bus

Protect

Table 6.5 Value denition (Translate decimal to hexadecimal for utilizing)

Command Byte3 Byte4 Byte5 Byte6

CV Mode

0 to 1000 for 0 to 1000V

CC Mode

0 to 600 for 0~60.0A

CP Mode

0 to 200 for 0 to 20.0kW

Master/Slave

Master: 00, Slave: 01

A/Ri Offset

Plus: 00, Minus: 01 0 to 99 for 0 to 9.9%

A/Vo Offset

Plus: 00, Minus: 01 0 to 99 for 0 to 9.9%

A/Io Offset

Plus: 00, Minus: 01 0 to 99 for 0 to 9.9%

Set Point

1 to 10 for 1 to 10s

Hard ARC

Shutdown Time

2 to 100 for 200 to 10000us, Scale: 100us

Pulse frequency

0 to 80 for DC to 400k Scale:5kHz

Pulse reverse time

4 to 100 for 0.4us to 10us Scale:0.1us

Energy Mode

1 to 99999 for 1 to 99999kJ, 0: OFF

Arc Function

OFF: 0, ON: 1

Max Power

20 to 200 for 2 to 20kW

Max Current

50 to 600 for 5 to 60A

Max Voltage

500 to 1000 for 500 to 1000V

Ramp Time

5 to 200 for 50 to 2000ms

Target Life

0 to 1500000 for OFF to 15000.00kWh, 0: OFF

Arc Voltage

25 to 200 for 25 to 200us

Arc Density

0 to 99 for 0 to 99 times/s

Arc Number

0 to 999 for 0 to 999 times

Ignition

10 to 15 for 1000 to 1500V

Note: Please use hexadecimal

6.5 Analog Communication Port (User)

The 15-pin female subminiature-D connector labeled “User Port” on the rear of the power

supply lets you connect with control box to control the power supply in analog signal. Denition of

15-pin female subminiature-D connector is as follows:

Figure 6.5 Connector of user port, 15pin female subminiature-D

Table 6.6 Denition of subminiature-D connector

Pin Dene I/O Description

1 +24V

I External 24V is connected to the collector of photo coupler

2 VOUT_A

Pin 2 shows the reader of output voltage

0 to 10 V for V = 0 to 1000 V

3 POUT_A

Pin 3 shows the reader of output Power

0 to 10 V for P = 0 to 20 kW

4 OUTPUT_ENABLE_D

I Turn on the output power by pulling the pin low

5 XPROG_A

User could adjust regulation by Pin 5

0 to 10 V for P = 0 to 20 kW

6 COM_A

- The return pin for VOUT_A, POUT_A, XPROG_A

7 PWRON_D

O Pin 7 shows the on/off state of output

8 PWRON COM_D

- The return pin for PWRON_D

OUTPUT_ENABLE_

COM_D

- The return pin for OUTPUT_ENABLE_D

10 MOD GREEN

Pin 10 is connected to the emitter of photo coupler for MOD

GREEN function

11 INTERLOCK_D

I Pin 11 indicates the disconnection of interlock

12 INTLK COM_D

- The return pin for INTERLOCK_D

13 NET GREEN

Pin 13 is connected to the emitter of photo coupler for NET

GREEN function

14 MOD AMBER

Pin 14 is connected to the emitter of photo coupler for MOD

AMBER function

15 NET AMBER

Pin 15 is connected to the emitter of photo coupler for NET

AMBER function

Note 6.5: Precaution for external connection

- Port of digital Signal input

To control the input signal, a switch is utilized between the ports and isolated ground.

Open → Floating

Close → Grounding

- Port of digital Signal output

The internal resistance of the ports is 5.1kohm, and a pull-up power supply V is required

with a 5.1kohm resistor.

Initial → > 0.9*V

Trigger → < 0.5*V + 1V

If V is connected to “+15V_ISO” supplied by pin18 with a 5.1kohm resistor, initial state

would be high than 13.5V and trigger state would be lower than 8.5V.

- Analog signal input port

An isolated amplier is utilized in the ports. The voltage level is 0 to 10V for user to enter the

command and shall not greater than 12V.

- Analog signal output port

An isolated amplier is utilized in the ports. The voltage level is 0 to 10V for users to read out

the output values of voltage, current, and power.

pull-up

Chapter 7 :Operation

7.1 Local Operating Steps

Step A

Import AC voltage to input connector on rear panel. The mains voltage level should be 400±

10% V .

Step B

Turn on the breaker to start the power supply. Now, you can see “LCD Display” is working and

shows the default setting of the power supply.

Step C

Choose one operating mode from “P”, “I”, “V” button, and “LCD Display” will show the mode you

selected and change the command unit mode by mode.

Operating mode cannot be changed during power on period. It only can select while power off.

Step D

Rotate the knob to adjust the regulation level. The command (P, I or V) will change by different

mode selection in step B. When in Power mode, the command can be adjusted from 0 to 20 kW;

when in Current mode, command can be adjusted from 0 to 50 A; when in Voltage mode, and com-

mand can be adjusted from 130 to 1000 V

Step E

Press the “On” button to turn on the output power. While power on, user could adjust output

regulation level by “Enter” button and “knob”. “LCD Display” will show the feedback values once the

output is on.

After power on, the electric shock may lead to death or serious injury. Please read this manual

carefully and follow the instruction steps before installation and operation, otherwise an electric

shock or a fatal accident might be caused.

Step F

Press the “Off” button to turn off the output power.

Step G

If the power supply is kept off for a while, please remove AC power cord.

Don’t touch the load before grounding it. And make sure the electricity is fully discharged by meter.

7.2 D-SUB Operating Step

Example 1: CP mode 20 kW output

Operating steps:

1. Set the front panel => Interface Setup => Communnication Setup => D-sub.

2. Command Level: Set +10 V input to pin 5 for 20 kW Command.

4. Power On: Connect pin 4 to pin 9.

5. Power Off: Remove pin14 from pin 9.

7.3 RS-232 Operating Steps

1. Set the front panel => Interface Setup => Communnication Setup => RS-232.

2. Follow the protocol dened in chapter 6.4 to operating.

7.4 RS-485 Operating Steps

1. Set the front panel => Interface Setup => Communnication Setup => RS-485.

2. Follow the protocol dened in chapter 6.4 to operating.

Chapter 8 :Maintenance

Alarm Condition Code Description Suggested Action

HW Fault M1

M1F Hardware error from the left module

Take all safety precaution,

and then check if the mains

voltage that is in specication.

Turn on the output power with

a dummy load to ensure if it is

under normal operation.

HW Fault M2

M2F Hardware error from the right module

Take all safety precaution,

and then check if the mains

voltage that is in specication.

Turn on the output power with

a dummy load to ensure if it is

under normal operation.

SW OVP

OV Output over voltage

Take all safety precaution,

and then check if the mains

voltage that is in specication.

Turn on the output power with

a dummy load to ensure if it is

under normal operation.

SW OCP

OC Output over current

Take all safety precaution,

and then check if the mains

voltage that is in specication.

Turn on the output power with

a dummy load to ensure if it is

under normal operation

SW OPP

OP Output over power

Take all safety precaution,

and then check if the mains

voltage that is in specication.

Turn on the output power with

a dummy load to ensure if it is

under normal operation.

Arc Number Limit

07 Arc number is over setting parameter

Press and hold “OFF” button

with 10 second to clear error.

Contactor Interlock

Uninstallation of contactor pin in D-sub

connector

Check if contactor pin in D-sub

connector is short.

Output Interlock

11 Uninstallation of output cover

Check if output cover is

correctly installed.

Communication Loss

15 Error from internal communication

Check if the bus between

panel and control card is

correctly connected.

Fan1 Error

17 Error from the left fan

Check if the cable between fan

in the left module 1 and control

card is correctly connected.

Fan2 Error

18 Error from the right fan

Check if the cable between

fan in the right module 2

and control card is correctly

connected.

Bus UVP

20 Input voltage is under operation range

Take all safety precaution,

and then check if the mains

voltage that is in specication.

Bus OVP

21 Input voltage is over operation range

Take all safety precaution,

and then check if the mains

voltage that is in specication.

GND Detect

Positive output is not connected to

protective earth

Check if the output positive

terminal is short to protective

earth.

Set Point Monitor

Error while output fails to reach setting

parameter within setting time

Take all safety precaution, and

then turn on the output power

with a dummy load to ensure if

it is under normal operation.

Energy Mode Monitor

Power off while output reaches setting

Energy

Monitor Setting is end. Press

and hold “OFF” button with 10

second to clear error.

Warning Condition Code Description Suggested Action

Arc Density Limit

01 Arc density is over setting parameter N/A

Output Limit

Limit Output is over setting parameters N/A